Thin film transistor array panel for a liquid crystal display and a method for manufacturing the same

ABSTRACT

Disclosed is a simplified manufacturing method for liquid crystal displays. A gate wire including a gate line, a gate pad and a gate electrode is formed on an insulating substrate. Next, a gate insulating layer covering the gate wire, a semiconductor layer, an ohmic contact layer, and a data conductive layer are sequentially deposited, and a photoresist pattern is formed on the data conductive layer. Following this step, the data conductive layer, using the photoresist pattern as an etch mask, is etched to form a data wire including a data line, a source electrode, a drain electrode, and a data pad. Next, the photoresist pattern is reflowed to cover the portion between the source electrode and the drain electrode, and a portion of the ohmic contact layer adjacent to a periphery of the data wire. Subsequently, portions of the ohmic contact layer and the semiconductor layer, which are not covered by the photoresist pattern, are etched, and the photoresist pattern is removed. Next, a portion of the ohmic contact layer, which is not covered by the data wire, is etched to expose a portion of the semiconductor layer between the source electrode and the drain electrode that is a channel portion of a thin film transistor. Finally, a protection layer, a pixel electrode, a redundant gate pad and a redundant data pad are formed.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of, and claims priority from, U.S.application Ser. No. 10/885,004, filed on Jul. 7, 2004, entitled “ThinFilm Transistor Array Panel for a Liquid Crystal Display and a Methodfor Manufacturing the Same,” which is a continuation of and claimspriority from U.S. application Ser. No. 10/280,049 filed Oct. 25, 2002(now issued as U.S. Pat. No. 6,768,521), which is a divisional of andclaims priority from U.S. application Ser. No. 09/421,478 filed Oct. 20,1999 (now issued as U.S. Pat. No. 6,493,048), which claims priority ofKorean patent application no. 1998-56725 filed Dec. 21, 1998 and Koreanpatent application no. 1998-44121, filed Oct. 21, 1998, all of which areincorporated by reference herein in their entireties.

BACKGROUND OF THE INVENTION

(a) Field of the Invention

The present invention relates to thin film transistor (TFT) array panelsfor a liquid crystal display (LCD) and a method for manufacturing thesame using four photolithography steps.

(b) Description of the Related Art

An LCD is one of the most widely used FPDs (flat panel displays). TheLCD includes two panels having electrodes for generating electric fieldsand a liquid crystal layer interposed between the two panels. Thetransmittance of incident light is controlled by the intensity of theelectric field applied to the liquid crystal layer.

The field-generating electrodes are typically provided at both or one ofthe panels, and one of the panels includes switching elements such asthin film transistors.

In general, a thin film transistor array panel is manufactured by aphotolithography process using a plurality of photomasks.Conventionally, five or six photolithography steps are employed. Sincethe photolithography process is expensive, it is desirable to reduce thenumber of photolithography steps. Even though manufacturing methodsusing only four photolithography steps have been suggested, theseproposed methods are not easy to implement.

SUMMARY OF THE INVENTION

It is therefore an object of the present invention to provide a newmanufacturing method for a thin film transistor array panel for a liquidcrystal display using four photolithography steps.

It is another object of the present invention to prevent the currentleakage in a liquid crystal display. Another object of the presentinvention is to reduce the step coverage of thin film transistor arraypanels for liquid crystal displays.

In order to achieve these and other objects, according to the presentinvention, a semiconductor layer and a protection layer of organicinsulating material are patterned in a single step. Also, according tothe present invention, a photoresist (PR) pattern is reflowed to form anupper layer. Thus, the reflowed PR pattern is used to form a lower layerunder the upper layer such that the lower layer is extended outside theupper layer.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a layout view of a thin film transistor array panel for aliquid crystal display according to a first embodiment of the presentinvention.

FIG. 2 is a cross-sectional view taken along line II-II of FIG. 1.

FIG. 3 is a cross-sectional view taken along line III-III of FIG. 1.

FIG. 4 is cross-sectional view taken along line IV-IV of FIG. 1.

FIGS. 5A, 6A and 7A are layout views illustrating, in order, sequentialsteps of manufacturing a thin film transistor array panel according to afirst embodiment of the present invention.

FIGS. 5B, 6B and 7B are cross-sectional views taken along lines VB-VB,VIB-VIB and VIIB-VIIB of FIGS. 5A, 6A and 7A, respectively.

FIGS. 5C, 6C and 7C are cross-sectional views taken along lines VC-VC,VIC-VIC and VIIC-VIIC of FIGS. 5A, 6A and 7A, respectively.

FIGS. 5D, 6D and 7D are cross-sectional views taken along lines VD-VD,VID-VID and VIID-VIID of FIGS. 5A, 6A and 7A, respectively.

FIGS. 8A-8B and 9A-9C are cross-sectional views taken along lineVIII-VIII of FIG. 7A.

FIG. 10 is a layout view of a thin film transistor array panel for aliquid crystal display according to a second embodiment of the presentinvention.

FIG. 11 is a cross-sectional view taken along line XI-XI of FIG. 10.

FIG. 12A is a layout view illustrating a first step in manufacturing athin film transistor array panel according to the second embodiment ofthe present invention.

FIG. 12B is a cross-sectional view taken along the line XIIB-XIIB′ ofFIG. 12A.

FIGS. 13 and 14 are cross-sectional views illustrating manufacturingsteps following that of FIG. 12A taken along the line XIIB-XIIB′ of FIG.12A

FIG. 15A is a layout view illustrating the thin film transistor arraypanel in a manufacturing step following that of FIG. 14.

FIG. 15B is a cross-sectional view taken along line XVB-XVB′ of FIG.15A.

FIG. 16A is a layout view illustrating the thin film transistor arraypanel in a manufacturing step following that of FIG. 15A.

FIG. 16B is a cross-sectional view taken along line XVIB-XVIB′ of FIG.16A.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The present invention now will be described more fully hereinafter withreference to the accompanying drawings, in which preferred embodimentsof the invention are shown. This invention may, however, be embodied inmany different forms and should not be construed as limited to theembodiments set forth herein. In the drawings, the thickness of layersand regions are exaggerated for clarity. Like numbers refer to likeelements throughout. It will be understood that when an element such asa layer, region or substrate is referred to as being “on” anotherelement, it can be directly on the other element or intervening elementsmay also be present. In contrast, when an element is referred to asbeing “directly on” another element, there are no intervening elementspresent.

The number of steps in a manufacturing method according to the presentinvention can be reduced by patterning a semiconductor layer and aprotection layer of organic insulating material in a single step.

First, the structure of a thin film transistor array panel for a liquidcrystal display produced through a method according to the firstembodiment of the present invention will be described with reference toFIGS. 1 to 4.

FIG. 1 is a layout view of a thin film transistor array panel for aliquid crystal display according to the first embodiment of the presentinvention, and FIGS. 2, 3 and 4 are cross-sectional views taken alonglines II-II, III-III and IV-IV of FIG. 1, respectively.

A gate wire and a storage wire, which are made of metal or conductivematerial such as aluminum. (AI) or aluminum alloy (Al alloy), molybdenum(Mo) or molybdenum-tungsten (MoW), and chromium (Cr), are formed on aninsulating substrate 10. The gate wire includes a gate line (scanningsignal line) 22 extending in the horizontal direction (in FIG. 1), agate pad 26 connected to an end of the gate line 22 and transmitting ascanning signal from an external circuit to the gate line 22, and a gateelectrode 24 that is a part of a thin film transistor. The storage wireincludes a storage line 28 parallel with the gate line 22, a storageelectrode 27 interconnecting the storage line 28 and the gate line 22,and a storage electrode 29 branched from the storage line 28. Thestorage wire forms a storage capacitance along with a pixel electrode84, which will be described hereinafter. It is possible not to form thestorage electrodes 27 and 29 if a storage capacitance between the pixelelectrode 84 and the gate line 22 is sufficient.

The gate wire and the storage wire may have a multi-layered structure ora single-layered structure. When the gate wire and the storage wire areformed in a multi-layered structure, it is preferable that one layer ismade of a material having a low resistivity and another layer is made ofa material having a good contact with other materials. Double layers ofCr/Al (or Al alloy) and Al/Mo are examples of materials of suchproperties.

A gate insulating layer 32 of silicon-nitride (SiNx) and a semiconductorlayer 42 of a semiconductor material such as hydrogenated amorphoussilicon are formed on the gate wire and the storage wire to cover them.The gate insulating layer 32 and the semiconductor layer 42 are similarin shape to the gate wire and the storage wire.

An ohmic contact layer 52, 54 and 56 made of a material such as n+amorphous silicon doped with N-type impurities of a high concentrationis formed on the semiconductor layer 42. A data wire made of conductivematerials such as Mo or MoW, Cr and Al or Al alloy is formed on theohmic contact layer pattern 52, 54 and 56. The data wire includes a dataline 62 extending in the vertical direction. (in FIG. 1) and has asource electrode of the TFT, a data pad 66 connected to an end of thedata line 62 and transmitting image signals from an external circuit tothe data line 62, and a drain electrode 64 located opposite to thesource electrode 62 with respect to the gate electrode 24. The data wireand the ohmic contact layer pattern 52, 54 and 56 have the same shape.

The data wire may have a multi-layered structure like the gate wire.When the data wire has a multi-layered structure, it is preferable thatone layer is made of a material having a low resistivity and anotherlayer is made of a material having a good contact with other materials.The ohmic contact layer pattern 52, 54 and 56 serves to reduce thecontact resistance between the semiconductor layer 42 and the data wire,and has the same layout as the data wire.

A protection layer 72 made of organic insulating material and coveringthe data wire is formed on the semiconductor layer 42. The protectionlayer 72 has contact holes 71 and 73 respectively exposing the drainelectrode 64 and the data pad 66, and a contact hole 75 exposing thegate pad 26 along with the gate insulating layer 32 and thesemiconductor layer 42.

The pixel electrode 84, which receives an image signal and generates anelectric field with a common electrode of an upper panel, is formed onthe substrate 10 of a pixel region defined by the gate line 22 and thedata line 62. The pixel electrode 84 is made of a transparent conductivematerial such as ITO (indium tin oxide). The pixel electrode 84 isconnected to the drain electrode 64 physically and electrically throughthe contact hole 71, and receives image signals from the drain electrode64.

A redundant gate pad 80 and a redundant data pad 82 respectivelyconnected to the gate pad 26 and the data pad 66 through the contactholes 75 and 73 are formed on the gate pad. 26 and the data pad 66.Since these redundant pads 80 and 82 protect the pads 26 and 66 andprovide additional adhesiveness between an external circuit and the pads26 and 66, they are optional. The pixel electrode 84 overlaps the gatelines 22 and the storage wire to form a storage capacitance.

In this embodiment, although transparent ITO is used for the pixelelectrode 82, an opaque-conductive material may be used in a reflectivetype LCD.

Furthermore, to prevent a parasitic channel from being formed on thegate line 22 and the storage line 28 when scanning signals are applied,the semiconductor layers 42 of adjacent pixel regions are separated bythe gate line 22 and the storage line 28. If adjacent data lines 62 areelectrically connected through the semiconductor layer 42, the parasiticchannel in the semiconductor layer 42 may leak currents, and the imagesignals applied to the data lines 62 interfere with each other.Accordingly, the semiconductor layers 42 between adjacent data lines 62must be separated from each other.

A method for manufacturing a thin film transistor array panel accordingto a first embodiment of the present invention will now be describedwith reference to the FIGS. 5A to 7D and FIGS. 1 to 4.

FIGS. 5A, 6A and 7A are layout views illustrating a method formanufacturing of a thin film transistor array panel according to thefirst embodiment of the present invention. FIGS. 5B, 6B and 7B show aTFT portion, a pixel portion and a storage portion. FIGS. 5C, 6C and 7Cshow a gate pad portion and FIGS. 5D, 6D and 7D show a data pad portion.

As shown in FIGS. 5A to 5D, a gate metal is deposited on a substrate 10and patterned by a first photolithography process to form a gate wireincluding a gate line 22, a gate electrode 24 and a gate pad 26, and astorage wire including a storage line 28 and storage electrodes 27 and29. As described previously, the gate wire and the storage wire are madeof metal or conductive material such as aluminum (Al) or aluminum alloy,molybdenum (Mo) or molybdenum-tungsten (MoW), and chromium (Cr).

As shown in FIGS. 6A to 6D, following the above, a gate insulating layer32 of silicon nitride, a semiconductor layer 42 of hydrogenatedamorphous silicon, an amorphous silicon layer heavily doped with N-typeimpurities such as phosphorus, and a data metal layer are deposited inthis order. Next, the data metal layer is patterned by a secondphotolithography process to form a data wire including a data line 62having a source electrode, a drain electrode 64, and a data pad 66.Then, the doped amorphous silicon layer that is not covered by the datawire is etched to form an ohmic contact layer 52, 54, 56 under the datametal layer.

Next, as shown in FIGS. 7A to 7D, a photo-sensitive organic insulatinglayer is deposited and etched along with the gate insulating layer 32and the semiconductor layer 42 by a third photolithography process toform a protection layer 72 having contact holes 71 and 73 exposing thedrain electrode 64 and the data pad 66, and a contact hole 75 exposingthe gate pad 26 along with the gate insulating layer 32, and thesemiconductor layer 42. At this time, as shown in FIG. 7A, theprotection layer 72, the semiconductor layer 42 and the gate insulatinglayer 32 cover (in an identical pattern) the gate wire, the storagewire, and the data wire, respectively. Here, a part of the protectionlayer 72 enclosing the data pad 66 and—having the contact hole 73 isdifferent from parts of the gate insulating layer 32 and thesemiconductor layer 42.

At this time, if amorphous silicon is left remaining on the gate line22, gate electrode 24, and storage line 28, adjacent data lines 62become electrically connected and data signals interfere with each otherbecause of the current leakage between each pair of data lines 62.Accordingly, it is preferable that parts of the semiconductor layers 42on the gate line 22, gate electrode 24, and storage line 28 are removedto separate adjacent data lines 62, i.e., to sever the electricalconnection between adjacent data lines 62. This is realized by removingportions of the protection layer 72 and the semiconductor layer 42corresponding to portions A in FIG. 7A. However, because the contacthole 75 must be simultaneously formed, the portion of the gate line 22,gate electrode 24, and storage line 28 corresponding to portions A areexposed. At this time, by a reflow process, the gate insulating layer 32or the protection layer 72 may cover the gate line 22, gate electrode24, and storage line 28 at areas corresponding to portions A, preventingthe exposure of gate wire in these areas. This will be described indetail hereinafter. At this time, a profile of the protection layer 72may be sloped.

First, a method for covering with the protection layer 72 the gate line22, gate electrode 24, and storage wire 28 through a reflow process willbe described in detail.

FIGS. 8A and 8B are the cross-sectional views taken along line VIII-VIIIof portion A in FIG. 7A. FIG. 8A is a cross-sectional view before areflow process, and FIG. 8B is a cross-sectional view after the reflowprocess.

As shown in FIG. 8A, when forming the contact holes 75, 73 and 71exposing the gate pad 26, the data pad 66 and the drain electrode 64,respectively, the gate line 22 is exposed by removing the protectionlayer 72, the semiconductor layer 42 and the gate insulating layer 32corresponding to portions A to remove the semiconductor layer 42 underadjacent data lines 62. Because the etch selectivity of the data metallayer prevents further etching, the semiconductor layer and the gateinsulating layer underlying the data pad 66 and the drain electrode 64are not removed.

Next, as shown in FIG. 8B, by the reflow process, the parts of theprotection layer 72, which is made of organic and reflowable material,flow into opening A, and the gate line 22 is covered with the protectionlayer 72. This method is used when the protection layer 72 is made oforganic and reflowable material.

A method for leaving the gate insulating layer 32 intact on the gateline 22, gate electrode 24, and storage wire 28 through a reflow processwill now be described in detail. FIGS. 9A to 9C are cross-sectionalviews taken along line VIII-VIII, of portion A in FIG. 7A. FIG. 9A is across-sectional view before a reflow process. FIG. 9B is across-sectional view after the reflow process and FIG. 9C is across-sectional view after an etch process.

As shown in FIG. 9A, formed in a third photolithography process are aphotoresist pattern 1000 having an opening A on the gate line 22 and aplurality of minute patterns 1001 provided on the protection layer 72 inthe opening A.

Next, if the reflow process is executed, as shown in FIG. 9B, the minutepatterns 1001 are reflowed into the opening A, and a photoresist layer1002 is formed on the protection layer 72 corresponding to the positionof the opening A.

Next, as shown in FIG. 9C, the protection layer 72, the semiconductorlayer 42 and the gate insulating layer 32 are etched to expose the gatepad 26 (see FIG. 7C). At this time, although the protection layer 72 andthe semiconductor layer 42 come to be divided into two portions withrespect to opening A, the gate insulating layer 32 covering the gateline 22 is not divided, because of the photoresist layer 1002 formed inopening A.

By using minute patterns of reflowable photoresist as described above,even if the substrate 10 at pixel regions and the gate pad 26 at padportions are exposed, the gate insulating layer 32 over the gate line22, gate electrode 24, and storage line 28 remain intact.

At this time, it is preferable that the amorphous silicon of opening Ais completely removed by controlling the thickness of the photoresistlayer 1002. If the photoresist layer 1002 is thin, the portion of thegate insulating layer 32 in opening A may be etched. In this method, thereflowable photoresist 1000, 1001 and 1002 is used rather than thereflowable protection layer 72 of the previous method. However, when thereflowable protection layer 72 is used as in the previous method, minutepatterns are formed as the protection layer and reflowed such that athin layer is formed as a protection layer in the opening A, therebyleaving the gate insulating 32 intact.

This method of using a reflow process for a selective etching may beused for manufacturing other semiconductor devices. That is, one etchprocess may not expose the storage line 28, gate line 22, and gateelectrode 24 in one area while exposing the substrate 10 and the gatepad 26 in the other area.

Subsequently, aluminum and aluminum alloy not covered by the protectionlayer 72 and exposed such as the gate pad 26, are removed by performingan etch process over an entire surface to improve contact quality withindium tin oxide (ITO). When the gate wire is made of aluminum oraluminum alloy of the upper layer, and the lower layer of chromium,molybdenum or molybdenum alloy, the lower layer of chromium, molybdenumor molybdenum alloy of the gate pad 26 is exposed.

Next, as shown in FIGS. 1 to 4, indium tin oxide (ITO) is deposited andpatterned by fourth photolithography processes to form a pixel electrode84 connected to the drain electrode 64, a redundant gate pad 80connected to the gate pad 26 and a redundant data pad 82 connected tothe data pad 66 through the contact hole 71, 75 and 73. The pixelelectrode 84, the redundant gate pad 80 and the redundant data pad 82contact with chromium, molybdenum or molybdenum alloy of the drainelectrode 64, the gate pad 26 and the data pad 66.

In the first embodiment of the present invention, the pad portion has adual-layered structure including the upper layer of ITO and the lowerlayer of chromium, molybdenum or molybdenum alloy. When the pad portionis a triple-layered structure, a conductive layer made of aluminum oraluminum alloy may be provided.

In the previous embodiment, the protection layer and the semiconductorlayer are simultaneously patterned to reduce the number of masks.However, severe step coverage makes the upper layers structurally weak.To overcome this problem, it is preferable that a lower layer be formedto extend past outside an upper layer. This will be described in detailhereinafter.

First, the structure of a thin film transistor array panel for a liquidcrystal display according to a second embodiment of the presentinvention will be described with reference to FIGS. 10 to 11.

FIG. 10 is a layout view of a thin film transistor array panel for aliquid crystal display according to the second embodiment of the presentinvention, and FIG. 11 is a cross-sectional view taken along line XI-XIof FIG. 10.

A gate wire and a storage wire, which are made of conductive materialsuch as aluminum (Al) or aluminum alloy, molybdenum (Mo) ormolybdenum-tungsten (MoW), and chromium (Cr), are formed on aninsulating substrate 10. The gate wire includes a gate line (scanningsignal line) 22 extending in the horizontal direction (in FIG. 10), agate pad 26 connected to an end of the gate line 22 and transmitting ascanning signal from an external circuit to the gate line 22, and a gateelectrode 24 that is a part of a thin film transistor. The gate line 22forms a storage capacitance along with a pixel electrode 84, which willbe described hereinafter. Storage electrodes overlapping the pixelelectrode 84 may be provided if the storage capacitance between thepixel electrode 84 and the gate line 22 is not sufficient.

The gate wire may have a multi-layered structure or a single-layeredstructure. When the gate wire has a multi-layered structure, it ispreferable that one layer is made of a material having a low resistivityand another layer is made of a material having a good contact with othermaterials. Double layers of Cr I Al (or Al alloy) and Al/Mo are suchexamples.

A gate insulating layer 32 of silicon-nitride (SiNx) covers the gatewire.

A semiconductor pattern 42, 44 and 46 made of such a material ashydrogenated amorphous silicon is formed on the gate insulating layer30. An ohmic contact pattern 52, 53, 54 and 56 of a material such as n+silicon amorphous hydride doped with N-type impurities at a highconcentration is formed on the semiconductor pattern 42, 44 and 46.

A data wire made of conductive materials such as Mo or MoW, Cr, Al or Alalloy and Ta is formed on the ohmic contact pattern 52, 53, 54 and 56.The data wire includes a data line 62 extending in the verticaldirection (in FIG. 10), a data pad 66 connected to an end of the dataline 62 and transmitting image signals from an external circuit to thedata line 62, a source electrode 63 that is a part of a thin filmtransistor and branched from the data line 62, and a drain electrode 64located opposite to the source electrode 63 with respect to the gateelectrode 24.

The data wire may have a multi-layered structure like the gate wire.When the data wire has a multi-layered structure, it is preferable thatone layer is made of a material having a low resistivity and anotherlayer is made of a material having a good contact with other materials.

The ohmic contact layer pattern 52, 53, 54 and 56 reduces the contactresistance between the semiconductor pattern 42, 44 and 46 and the datawire, having the same layout as the data wire. Here, an edge of thesemiconductor pattern 42, 44 and 46 is extended outside the data wire62, 63, 64 and 66, and a channel of the thin film transistor is formedin the semiconductor pattern 42, 44 and 46 between the source electrode63 and the drain electrode 64.

A protection layer 70 made of silicon-nitride (SiNx) or organicinsulating material is formed on the gate insulating layer 32 to coverthe data wire and the semiconductor pattern 42, 44 and 46. Theprotection layer 70 has contact holes 72 and 76 respectively exposingthe drain electrode 64 and the data pad 66, and a contact hole 74exposing the gate pad 26.

The pixel electrode 84, which receives an image signal and generates anelectric field in cooperation with a common electrode of an upper panel,is formed on the protection layer 70 of a pixel region defined by thegate line 22 and the data line 62. The pixel electrode 84 is made of atransparent conductive material such as ITO (indium tin oxide). Thepixel electrode 84 is connected to the drain electrode 64 physically andelectrically through the contact hole 72, and receives image signalsfrom the drain electrode 64.

A redundant gate pad 80 and a redundant data pad 82 respectivelyconnected to the gate pad 26 and the data pad 66 through the contactholes 74 and 76 are formed on the gate pad 26 and the data pad 66. Sincethese redundant pads 80 and 82 protect the pads 26 and 66 and provideadditional adhesiveness between an external circuit and the pads 26 and66, they are optional. The pixel electrode 84 overlaps the gate line 22to form a storage capacitance.

In this embodiment, although transparent ITO is taken as an example ofthe material of the pixel electrode 82, it is possible to use anopaque-conductive material in a reflective type LCD.

A manufacturing method of a thin film transistor array panel accordingto a second embodiment of the present invention will now be describedwith reference to the FIGS. 12A to 16B and FIGS. 10 to 11.

First, as shown in FIGS. 12A and 12B, a conductive layer of materialsuch as metal is deposited on a substrate 10 with a thickness of 1,000to 3,000 Å by using a sputtering deposition method, and patterned by afirst photolithography process by using a wet or dry etch process toform a gate wire including a gate line 22, a gate electrode 24 and agate pad 26.

Next, as shown in FIG. 13, a gate insulating layer 32 of silicon nitridewith a thickness of 1,500 to 5,000 Å, a semiconductor layer 42 made ofhydrogenated amorphous silicon with a thickness of 500 to 2,000 Å, and adoped amorphous silicon layer heavily doped with impurities such asphosphorus with a thickness of 300 to 600 Å are deposited, in thisorder, by a chemical vapor deposition process.

Then, a conductive layer of material such as metal is deposited with athickness of 1,500 to 3,000 Å by using a sputtering deposition method,and photoresist is coated with a thickness of 10,000 to 20,000 Å on theconductive layer. The photoresist is exposed and developed using asecond mask, which is used for a data wire, to form a photoresistpattern 112, 114 and 116. The portion of the conductive layer notcovered by the photoresist pattern 112, 114, 116 is etched to form adata wire, the data wire including a data line 62, a source electrode63, a drain electrode 64 and a data pad 66 on the doped amorphoussilicon layer.

Next, as shown in FIG. 14, the photoresist pattern 112, 114 and 116 isreflowed such that a new photoresist pattern 115 covering the dopedamorphous silicon 50 between the source electrode 63 and the drainelectrode 64 is formed, and a periphery of the data wire is completelycovered by the photoresist pattern 112, 114 and 116. Subsequently,portions of the doped amorphous silicon layer 50 and the amorphoussilicon layer 40 not covered by the data wire 62, 64 and 66 are etchedto form an ohmic contact layer 52, 56, and 58 and a semiconductorpattern 42, 44 and 46 to be extended outside the data wire 62, 64 and66.

Next, the photoresist pattern 112, 114, 115 and 116 is removed, and alsoremoved is the doped amorphous silicon layer not covered by the datawire such that the ohmic contact layer 58 under the source and drainelectrodes 63 and 64 is divided into two portions 53 and 54, therebyexposing the semiconductor pattern 44 between the source and drainelectrodes 63 and 64. At this time, the ohmic contact layer pattern 52,53, 54 and 56 and the data wire have the same layout.

Here, as shown in FIG. 14, because portions of the photoresist pattern112, 114, 115 and 116 corresponding to where the ohmic contact layer 52,56 and 58 is not covered by the data wire 62, 63, 64 and 66, are thinnerthan other portions of the photoresist pattern 112, 114, 115 and 116, itis possible to change the order of the above method and remove the firstamorphous silicon layer not covered by the data wire, after which thephotoresist pattern 112, 114, 115 and, 116 is removed. In this etchprocess, both dry or wet etch methods can be used, and it is preferablethat etching is performed under the condition where the data wire andthe gate insulating layer 32 are not easily etched, while thephotoresist pattern 112, 114, 115 and 116 and the amorphous siliconlayer are easily etched.

Furthermore, after the data wire 62, 63, 64 and 66 is formed, theexposed doped amorphous silicon layer is etched to form the ohmiccontact layer 52, 53, 54 and 56 (see FIG. 15B).

Next, as shown in FIGS. 16A and 16B, an organic insulating material iscoated by using a spin coating method or silicon nitride is deposited byusing a chemical vapor deposition method to form a protection layer 70with a thickness of more than 3,000 Å. Subsequently, the protectionlayer 70 is etched along with the gate insulating layer 32 and thesemiconductor layer 42 by a third photolithography process to formcontact holes 72, 76 and 74 respectively exposing the drain electrode64, data pad 66, and gate pad 26.

Finally, as shown in FIGS. 10 to 11, indium tin oxide (ITO) is depositedand patterned by a fourth photolithography process to form a pixelelectrode 84 connected to the drain electrode 64 through the contacthole 72, a redundant gate pad 80 connected to the gate pad 26 throughthe contact hole 74, and a redundant data pad 82 connected to the datapad 66 through the contact hole 76.

In this embodiment according to the present invention, the data wire,the ohmic contact layer 52, 53, 54 and 56, and the semiconductor pattern42, 44 and 46 are formed by using a single mask, thereby minimizing thetotal number of masks required. Further, the semiconductor pattern 42,44 and 46 is formed extending outside the data wire such that the stepcoverage of the triple layer, realized through the data wire, the ohmiccontact layer 52, 53, 54 and 56, and the semiconductor pattern 42, 44and 46, is formed in two steps. Accordingly, the structure of theprotection layer 70 and the pixel electrode 84 may become less fragile.

This method may also be adapted to the first embodiment. The photoresistpattern to form the protection layer is reflowed and the reflowedphotoresist pattern can be used to etch the semiconductor layer or thegate insulating layer.

In the present invention, the manufacturing process of a thin filmtransistor panel for a liquid crystal display is simplified by reducingthe number of masks required in the process. As a result, manufacturingcosts may be minimized. The leakage of current from the liquid crystaldisplay can also be reduced, and the step coverage of the layers isstrengthened.

1. (canceled)
 2. A thin film transistor array panel, comprising: a gatewire including a plurality of gate lines and a plurality of gateelectrodes, and formed on an insulating substrate; a gate insulatinglayer covering the gate wire; a semiconductor layer formed on the gateinsulating layer; an ohmic contact layer formed on the semiconductorlayer; a data wire formed on the ohmic contact layer, wherein the datawire includes a plurality of data line intersecting the gate lines, aplurality of source electrodes connected to the data lines and extendingonto the gate electrodes, and a plurality of drain electrodes locatedopposite the source electrodes with the gate electrodes therebetween; aprotection layer formed on the data wire and the semiconductor layer,and having a plurality of first contact holes exposing the drainelectrodes; and a plurality of pixel electrodes connected to the drainelectrodes through the first contact holes, wherein the ohmic contactlayer extends substantially along the data lines, the gate wire have ataper structure, and the protection layer cover the semiconductor layerbetween the source electrode and the drain electrode.
 3. The thin filmtransistor array panel of claim 2, wherein the ohmic contact layer hassubstantially the same planar shape as the data wire.
 4. The thin filmtransistor array panel of claim 3, wherein the portion of the data padand the ohmic contact layer on the portion of the data line has a taperstructure.
 5. The thin film transistor array panel of claim 2, whereinthe protection layer have a plurality of second contact holes and aplurality of third contact holes respectively exposing portions of thegate lines and the data lines.
 6. The thin film transistor array panelof claim 5, further comprising a plurality of redundant gate padsrespectively connected to the gate lines through the second contactholes, and a plurality of redundant data pads respectively connected tothe data lines through the third contact holes.
 7. The thin filmtransistor array panel of claim 6, wherein the redundant gate pads andthe redundant data pads are formed with the same layer as the pixelelectrodes.
 8. The thin film transistor array panel of claim 2, whereinthe semiconductor layer, the gate insulating layer and the protectionlayer have a plurality of openings exposing the insulating substrate inthe regions enclosed by the gate lines and the data lines.
 9. The thinfilm transistor array panel of claim 2, further comprising a pluralityof storage electrode overlapping the pixel electrodes.